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Title:
HEAT TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JP2012177502
Kind Code:
A
Abstract:

To provide a heat treatment apparatus in which variations in temperature in a circumferential direction can be decreased in a heat treatment zone.

A heat treatment apparatus 10 includes a cylindrical heat treatment zone 26 on a furnace bed 12 and in a furnace body 20. A curved inner circumferential heater 34 is disposed in the inner circumferential side of the heat treatment zone 26. A curved outer circumferential heater 40 is disposed in the outer circumferential side of the heat treatment zone 26, opposing to the inner circumferential heater 34 across the heat treatment zone 26. Three stages of inner circumferential heater parts 36a, 36b, 36c formed by dividing the inner circumferential heater 34 in a height direction oppose to three stages of outer circumferential heater parts 42a, 42b, 42c formed by dividing the outer circumferential heater 40 in a height direction, respectively.


Inventors:
AOKI YASUNORI
OHARA TAKASHI
TAKAHATA TAKESHI
Application Number:
JP2011040172A
Publication Date:
September 13, 2012
Filing Date:
February 25, 2011
Export Citation:
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Assignee:
MURATA MANUFACTURING CO
International Classes:
F27D11/02; F27B17/00
Domestic Patent References:
JPH06208885A1994-07-26
JP2003197552A2003-07-11
JPH04306485A1992-10-29
JPH05172471A1993-07-09
JPS6354587A1988-03-08
JP2007285585A2007-11-01
Attorney, Agent or Firm:
Masahiro Okada