Title:
HEAT TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JP2018067653
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To achieve a reduction in cost of maintenance furthermore in a heat treatment apparatus that includes an exhaust pipe provided with a function for cooling exhaust gas from a tube.SOLUTION: A heat treatment apparatus 1 includes a discharge section 3 for discharging exhaust gas in a tube 2 that can accommodate an object 100 to be treated therein. The discharge section 3 includes: a first exhaust pipe 11 connected to the tube 2; a second exhaust pipe 14 spaced from the first exhaust pipe 11; and a cooling medium supply section 13 for supplying a cooling medium to cool the exhaust gas flowing from the first exhaust pipe 11 to the second exhaust pipe 14, the cooling medium supply section being provided to be separable from at least one of the first exhaust pipe 11 and a second exhaust pipe 14.SELECTED DRAWING: Figure 1
Inventors:
KUBOTA WATARU
Application Number:
JP2016205878A
Publication Date:
April 26, 2018
Filing Date:
October 20, 2016
Export Citation:
Assignee:
KOYO THERMO SYS KK
International Classes:
H01L21/31; C23C16/44; F27B17/00; F27D17/00; H01L21/22; H01L21/324
Attorney, Agent or Firm:
Patent Corporation Wandee ip Partners