Title:
HEAT TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JP3543949
Kind Code:
B
Abstract:
PROBLEM TO BE SOLVED: To enable stable control, without the need for atmospheric air introduction and inert gas introduction, simplify the structure of an exhaust system and reduce cost.
SOLUTION: An apparatus, where a treatment object matter (w) is contained in the interior of a treatment furnace 1 and oxidation treatment is performed at a prescribed temperature by feeding a treatment gas is provided with an atmospheric exhaust system 12 for exhausting the interior of the treatment furnace 1 at a prescribed exhaust pressure, a combination valve 18 provided on the atmospheric exhaust system 12 and capable of performing opening/closing and pressure control, a differential pressure type or absolute pressure type pressure sensor 17 for detecting the exhaust pressure, and a control part 19 for controlling the combination valve 18, on the basis of the pressure detected by the pressure sensor 18.
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Inventors:
Saito, Yukimasa
Application Number:
JP2000000184309
Publication Date:
April 16, 2004
Filing Date:
June 20, 2000
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
F27D19/00; C23C16/44; F27B5/04; F27B5/18; H01L21/00; H01L21/22; H01L21/31; (IPC1-7): H01L21/31; F27B5/04; F27B5/18; F27D19/00; H01L21/22
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