Title:
HEAT TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JP3614748
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a heat treatment apparatus capable of being surely sealed even without cooling a furnace cover and not generating particles.
SOLUTION: A furnace opening 16 is provided by partly opening a furnace body 1 for heating a material to be heated. A furnace cover 19 is contacted with a sealing member 17 provided at the body 1 so as to surround the opening 16 to airtightly close the opening 16. A flexible heat resistant resin sheet 27 is disposed on a part of the cover 19 contacted with the member 17 of the body 1. A backup member 28 having a heat insulation and an elasticity is disposed on a surface side opposite to the surface of the sheet 27 contacted with the member 17.
Inventors:
Torii Sadao
Abe Noriyoshi
Abe Noriyoshi
Application Number:
JP2000062934A
Publication Date:
January 26, 2005
Filing Date:
March 08, 2000
Export Citation:
Assignee:
Denko Co., Ltd.
International Classes:
G02F1/13; F27B5/04; F27B5/06; F27B5/14; F27D1/18; F27D7/06; (IPC1-7): F27B5/04; F27B5/06; F27B5/14; F27D1/18; F27D7/06; G02F1/13
Attorney, Agent or Firm:
Hidetoshi Matsumoto