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Title:
HEAT TREATMENT DEVICE AND METHOD FOR MANUFACTURING RESISTIVE HEAT GENERATING MEMBER
Document Type and Number:
Japanese Patent JP2001255069
Kind Code:
A
Abstract:

To facilitate manufacturing of a helical resistive heat-generating member composed of ceramic resistive heat generating member, and improve its productivity, quality and uniform temperature characteristic.

There is provided a heat treatment device 1 comprising a processing container 2 for storing treated items to perform a heat treatment for them, and a heater device 5 having a resistive heat-generating member 4 at an inner circumference of a cylindrical heat insulating material 3 enclosing a circumference of the processing container 2. The resistive heat-generating member 4 of the heater device 5 is formed such that either arcuate or one to several turns of a plurality of resistive heat generating composing pieces 4a having ceramic resistive heat generating member are connected to form a helical shape.


Inventors:
KOBAYASHI MAKOTO
Application Number:
JP2000065319A
Publication Date:
September 21, 2001
Filing Date:
March 09, 2000
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
H05B3/00; F27B5/04; F27B5/14; F27D11/02; H01L21/22; (IPC1-7): F27B5/04; F27B5/14; F27D11/02; H01L21/22; H05B3/00
Attorney, Agent or Firm:
Noriyuki Kanasaka