To provide a heat treatment device capable of effectively utilizing the heat released from a treated object after heating treatment in a heat treatment chamber, by converting the heat into electric power in a cooling chamber.
The cooling chamber 2 is provided at a lower portion of the heat treatment chamber horizontally movably between a connecting position where an opening portion 21 is faced to a throat of the heat treatment chamber and a retracting position for opening a lower portion of the throat, and a thermoelectric conversion module is mounted on the whole surface of the cooling chamber including a lid body 22. The heat released from a heated semiconductor wafer W stored in the cooling chamber, is conducted to cooling water in a cooling jacket from a light absorbing body through the thermoelectric conversion module, and converted into electric power by the thermoelectric conversion module during this time.
JPH09111325 | HEAT EXCHANGING METHOD IN SMELTING REDUCTION IRON-MAKING METHOD |
JPS52109406 | PRE-TREATMENT OF RAW MATERIALS FOR CONVERTER |
JP2011174703 | DEGREASING FURNACE |
JP2002171776A | 2002-06-14 | |||
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JPH10242155A | 1998-09-11 | |||
JP2000274955A | 2000-10-06 |
WO2006090430A1 | 2006-08-31 |
Toshio Ozawa
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