To provide a heat treatment device capable of oxidatively decomposing a sublimate generated at performing heat treatment on a treated object without depending on a temperature of air circulated in a heat treatment portion.
This heat treatment device 10 comprises a heat insulating furnace 11 composed of the heat treatment portion 20 for performing the heat treatment on a treated object W, and an air conditioning portion 30 for heating and circulating air, the heat insulating furnace 11 has a photocatalyst means 31 capable of decomposing the sublimate generated at performing the heat treatment on the treated object W, and the photocatalyst means 31 is disposed in a position to which light is applied and which is kept into contact with the air circulated in the heat insulating furnace 11.
JP2001338853A | 2001-12-07 | |||
JP2005071632A | 2005-03-17 | |||
JPH11285623A | 1999-10-19 | |||
JP2004251534A | 2004-09-09 | |||
JP2006017357A | 2006-01-19 |
Takao Ito
Jiro Higuchi
Tamagushi Yukihisa