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Title:
HEAT TREATMENT DEVICE
Document Type and Number:
Japanese Patent JP2008309354
Kind Code:
A
Abstract:

To provide a heat treatment device capable of oxidatively decomposing a sublimate generated at performing heat treatment on a treated object without depending on a temperature of air circulated in a heat treatment portion.

This heat treatment device 10 comprises a heat insulating furnace 11 composed of the heat treatment portion 20 for performing the heat treatment on a treated object W, and an air conditioning portion 30 for heating and circulating air, the heat insulating furnace 11 has a photocatalyst means 31 capable of decomposing the sublimate generated at performing the heat treatment on the treated object W, and the photocatalyst means 31 is disposed in a position to which light is applied and which is kept into contact with the air circulated in the heat insulating furnace 11.


Inventors:
TEZENI NAGAMITSU
Application Number:
JP2007155064A
Publication Date:
December 25, 2008
Filing Date:
June 12, 2007
Export Citation:
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Assignee:
ESPEC CORP
International Classes:
F27D7/00; F27B17/00; F27D7/04; F27D99/00; G02F1/1333
Domestic Patent References:
JP2001338853A2001-12-07
JP2005071632A2005-03-17
JPH11285623A1999-10-19
JP2004251534A2004-09-09
JP2006017357A2006-01-19
Attorney, Agent or Firm:
Etsushi Kotani
Takao Ito
Jiro Higuchi
Tamagushi Yukihisa