Title:
HEAT TREATMENT DEVICE
Document Type and Number:
Japanese Patent JP2009243879
Kind Code:
A
Abstract:
To provide a heat treatment device capable of suppressing accumulation of sublimate within a derivation duct.
The heat processing device 1A heat-treats a processed object W by circulating and heating air in a heat treating part 21 in such a state that the processed object W is housed in the heat treating part 21 and ventilates the inside of the heat treating part 21 by feeding heated outside air into the heat treating part 21 and letting the air inside the heat treating part 21 flow into the derivation duct 5. The derivation duct 5 is provided with a catalyst 6 capable of degrading the sublimate generated from the processed object W during heat-treating the processed object W.
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Inventors:
NAGANO YUKIO
TEZENI NAGAMITSU
TEZENI NAGAMITSU
Application Number:
JP2009177904A
Publication Date:
October 22, 2009
Filing Date:
July 30, 2009
Export Citation:
Assignee:
ESPEC CORP
International Classes:
F27D17/00; F27B5/02; F27B5/16; F27D7/02
Domestic Patent References:
| JPH10197166A | 1998-07-31 | |||
| JP2003214772A | 2003-07-30 |
Attorney, Agent or Firm:
Etsushi Kotani
Masataka Otani
Tamagushi Yukihisa
Masataka Otani
Tamagushi Yukihisa
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