Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
HEAT TREATMENT DEVICE
Document Type and Number:
Japanese Patent JP2013185760
Kind Code:
A
Abstract:

To increase heating efficiency of a susceptor while preventing the temperature of a partition window from rising.

A heat treatment device includes: a susceptor 112 that is made of a conductive material and arranged within a treatment chamber 102, and loads wafers; a magnetic flux formation unit that includes an induction coil 124 that forms an alternating current magnetic flux that inductively heats a susceptor by generating magnetic flux that enters the susceptor; a partition window 200 that is in between and separate the susceptor and the magnetic flux formation unit and is comprised of an insulator that passes magnetic flux from the magnetic flux formation unit through to the susceptor side; and an infrared ray reflector 210 that is arranged between the partition window and the susceptor and reflects infrared rays emitted from the inductively-heated susceptor. The infrared ray reflector is comprised of metal dividers 212 that divide the entire surface of the reflector into a plurality of regions and are arrayed so as to electrically separate the regions.


Inventors:
YONENAGA TOMIHIRO
Application Number:
JP2012000051656
Publication Date:
September 19, 2013
Filing Date:
March 08, 2012
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
TOKYO ELECTRON LTD
International Classes:
F27B17/00; C23C16/46; F27D11/06; H01L21/31; H05B6/10; H05B6/36
Attorney, Agent or Firm:
大山 浩明