To provide a heat treatment device capable of easily recovering a vaporized fluorine inert fluid in the heat treatment device.
A heat treatment device 1 heat-treats an electron device with a fluorine inert fluid 9 as a heat medium. The heat treatment device 1 includes: a holding tank 2 which has an opening 2a and a fluid holding part 2b for holding the fluorine inert fluid 9; and a cover 5 which is arranged on an opening 2a side of the holding tank 2 and has an inner surface 5a opposite to a fluid holding part 2b side and an outer surface 5b as a surface opposite to the inner surface 5a. A basket 7 for holding the electron device is arranged on the cover 5. A hollow 5d for communicating the fluid holding part 2b and an outside of the heat treatment device 1 is formed on the cover 5 apart from the basket 7 when viewed from above the outer surface 5b.
JPS63111901A | 1988-05-17 | |||
JPH0636976A | 1994-02-10 | |||
JPH0459451U | 1992-05-21 | |||
JPS60263836A | 1985-12-27 | |||
JPH0296634A | 1990-04-09 | |||
JPS63166210A | 1988-07-09 | |||
JPH08114537A | 1996-05-07 | |||
JPH10113501A | 1998-05-06 | |||
JPH10115401A | 1998-05-06 | |||
JPH03229474A | 1991-10-11 | |||
JPS6264473A | 1987-03-23 | |||
JPS63111901A | 1988-05-17 | |||
JPH0636976A | 1994-02-10 | |||
JPH0459451U | 1992-05-21 | |||
JPS60263836A | 1985-12-27 | |||
JPH0296634A | 1990-04-09 | |||
JPS63166210A | 1988-07-09 | |||
JPH08114537A | 1996-05-07 | |||
JPH10113501A | 1998-05-06 | |||
JPH10115401A | 1998-05-06 | |||
JPH03229474A | 1991-10-11 | |||
JPS6264473A | 1987-03-23 |
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