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Title:
HEAT TREATMENT DEVICE
Document Type and Number:
Japanese Patent JP2013190112
Kind Code:
A
Abstract:

To provide a heat treatment device capable of easily recovering a vaporized fluorine inert fluid in the heat treatment device.

A heat treatment device 1 heat-treats an electron device with a fluorine inert fluid 9 as a heat medium. The heat treatment device 1 includes: a holding tank 2 which has an opening 2a and a fluid holding part 2b for holding the fluorine inert fluid 9; and a cover 5 which is arranged on an opening 2a side of the holding tank 2 and has an inner surface 5a opposite to a fluid holding part 2b side and an outer surface 5b as a surface opposite to the inner surface 5a. A basket 7 for holding the electron device is arranged on the cover 5. A hollow 5d for communicating the fluid holding part 2b and an outside of the heat treatment device 1 is formed on the cover 5 apart from the basket 7 when viewed from above the outer surface 5b.


Inventors:
TOMINAGA HIROMI
Application Number:
JP2012054635A
Publication Date:
September 26, 2013
Filing Date:
March 12, 2012
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
F27B17/00; G01N17/00
Domestic Patent References:
JPS63111901A1988-05-17
JPH0636976A1994-02-10
JPH0459451U1992-05-21
JPS60263836A1985-12-27
JPH0296634A1990-04-09
JPS63166210A1988-07-09
JPH08114537A1996-05-07
JPH10113501A1998-05-06
JPH10115401A1998-05-06
JPH03229474A1991-10-11
JPS6264473A1987-03-23
JPS63111901A1988-05-17
JPH0636976A1994-02-10
JPH0459451U1992-05-21
JPS60263836A1985-12-27
JPH0296634A1990-04-09
JPS63166210A1988-07-09
JPH08114537A1996-05-07
JPH10113501A1998-05-06
JPH10115401A1998-05-06
JPH03229474A1991-10-11
JPS6264473A1987-03-23
Attorney, Agent or Firm:
Fukami patent office