Title:
HEAT TREATMENT DEVICE
Document Type and Number:
Japanese Patent JP2016084990
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a heat treatment device that can adjust heat insulation capability for each region.SOLUTION: A heat treatment device comprises: a treatment container 4; a heating element 48 provided around the treatment container; a plurality of heat insulation means 51 separately provided around the heating element so as to cover different regions of the heating element; a plurality of exhaust pipes 70 connected to the plurality of heat insulation means respectively; and evacuation means 90 connected to the plurality of exhaust pipes.SELECTED DRAWING: Figure 2
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Inventors:
KOBAYASHI MAKOTO
Application Number:
JP2014218383A
Publication Date:
May 19, 2016
Filing Date:
October 27, 2014
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
F27D7/06; F16L59/00; F27B5/14; F27D11/02; H05B3/14
Domestic Patent References:
| JPH07106262A | 1995-04-21 | |||
| JP2007142363A | 2007-06-07 | |||
| JP2003197552A | 2003-07-11 | |||
| JPS54165344U | 1979-11-20 | |||
| JP2008262959A | 2008-10-30 | |||
| JPS63144866A | 1988-06-17 | |||
| JP2012049380A | 2012-03-08 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito