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Title:
HEAT TREATMENT DEVICE
Document Type and Number:
Japanese Patent JP2019109014
Kind Code:
A
Abstract:
To provide a heat treatment device capable of efficiently recovering impurities included in a workpiece.SOLUTION: Provided is a heat treatment device where a workpiece is heated and fired, comprising: a heating chamber; a relay chamber; a cooling chamber; a valve body; a heater for the heating chamber; a heater for the relay chamber; a vacuum pump; and a control part. The cooling chamber is provided with an impurity recovery plate and a cooling plate, and the control part practices: a first heating step of, in a state where a workpiece is arranged at the heating chamber and the valve body is arranged at an opening position, driving the heater for the heating chamber and the heater for the relay chamber and heating the heating chamber and the relay chamber, thus vaporizing impurities included in the workpiece so as to be fed to the cooling chamber via the relay chamber; and a second heating step of, after the first heating step, in a state where the valve body is arranged at a closed position, at least driving the heater for the heating chamber and heating the heating chamber, thus heating and firing the workpiece in the heating chamber.SELECTED DRAWING: Figure 1

Inventors:
ITO YUSO
NUMATA TERUHIKO
Application Number:
JP2017242069A
Publication Date:
July 04, 2019
Filing Date:
December 18, 2017
Export Citation:
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Assignee:
CHUGAI RO KOGYO KAISHA LTD
International Classes:
F27B17/00; F27D7/06; F27D19/00
Attorney, Agent or Firm:
Takuji Yamada
Yasushi Ohata
Yukino Okunishi
Yuzo Yamada



 
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