Title:
熱処理装置及び記憶媒体
Document Type and Number:
Japanese Patent JP5055756
Kind Code:
B2
Abstract:
A heat treatment apparatus for performing prescribed heat treatment to a subject (W) to be treated is provided with a processing chamber in which air can be exhausted; a mounting table arranged in the processing chamber, for placing on an upper plane the subject to be treated; a plurality of thermoelectric conversion elements arranged on an upper part of the mounting table; a light transmitting window for covering a ceiling portion of the processing chamber airtight; and a gas introduction unit for introducing a required gas into the processing chamber. A heating unit which includes a plurality of heating light sources including a semiconductor light emitting element for emitting heating light to the subject to be treated, is provided above the light transmitting window. Thus, heating efficiency is improved and temperature can be increased and reduced at a higher speed for the subject to be treated.
Inventors:
Shimizu Masahiro
Shigeru Kasai
Yoneda Shogo
Shigeru Kasai
Yoneda Shogo
Application Number:
JP2005351220A
Publication Date:
October 24, 2012
Filing Date:
December 05, 2005
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/26; H01L21/268; H01L21/324
Domestic Patent References:
| JP2003077857A | ||||
| JP2005101237A | ||||
| JP2001044554A |
Foreign References:
| WO2004015348A1 |
Attorney, Agent or Firm:
Akihiro Asai