加熱処理装置 - 東京エレクトロン株式会社

Title:

加熱処理装置

Document Type and Number:

Japanese Patent JP4021140

Kind Code:

B2

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Inventors:

Mitsuhiro Tagami
Tetsuya Oda

Application Number:

JP2000291714A

Publication Date:

December 12, 2007

Filing Date:

September 26, 2000

Export Citation:

Assignee:

東京エレクトロン株式会社

International Classes:

G03F7/30; H01L21/027; F27D9/00; H05B3/68

Domestic Patent References:

Attorney, Agent or Firm:

Tetsuo Kanamoto
Miaki Kametani
Koji Hagiwara

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Next Patent: 硝子体手術装置