Title:
熱処理装置
Document Type and Number:
Japanese Patent JP4036598
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a heat treatment apparatus enabling safe and easy work for heater replacement and having a reduced replacement cost. SOLUTION: The heat treatment apparatus comprises a heat treatment furnace provided with a gas exhausting duct 22 above a heater unit 21 containing a reaction tube and gas exhaust parts 25, 26 on the exhausting duct. The duct can be separated from the heater unit.
Inventors:
Satoshi Taniyama
Masayuki Kobayashi
Masayuki Kobayashi
Application Number:
JP2000097497A
Publication Date:
January 23, 2008
Filing Date:
March 31, 2000
Export Citation:
Assignee:
Hitachi Kokusai Electric Co., Ltd.
International Classes:
F27D17/00; F27B5/06; F27B5/14; F27B5/16; H01L21/205; H01L21/22
Domestic Patent References:
| JP8055811A | ||||
| JP4222386A | ||||
| JP5121344A | ||||
| JP10135230A | ||||
| JP7335581A | ||||
| JP10083994A | ||||
| JP11297633A | ||||
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| JP4158513A | ||||
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| JP2007110141A | ||||
| JP2001250786A | ||||
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Attorney, Agent or Firm:
Shoji Miyoshi