To exhaust sublimed gas or the like by a small amount of air with high heat efficiency.

An IR heater H which is a heating device is composed of a heat generation part 1 in which a resistance body is arranged between an insulation glass like a thin film and a protection glass so as to nip and hold it, an air feed passage 2 which is arranged to receive heat in the heat generation part 1 in a range opposing to a substrate W and in which air is supplied, an intake passage 3 arranged in the same way to suck the air containing sublimed gas or the like, many blow-out holes 21 and suction holes 31 distributed uniformly, and a heat radiation body 7 forming them, radiating heat by receiving heat in the heat generation part 1, and composed of an upper plate 4, an intermediate plate 5, and a lower plate 6. Since sublimed gas can be exhausted by feeding and sucking air by the IR heater only by only a narrowly-limited volume part between the IR heater and the substrate W when they are mounted in a heat treating device, exhaust efficiency is improved, a duct becomes unnecessary, and the heat treating device can be miniaturized.

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