Title:
熱処理装置
Document Type and Number:
Japanese Patent JP4438246
Kind Code:
B2
Inventors:
Takanori Saito
Choei Nagauchi
Choei Nagauchi
Application Number:
JP2001095065A
Publication Date:
March 24, 2010
Filing Date:
March 29, 2001
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/205; H05B3/62; F27B5/14; F27B5/16; F27D1/00; F27D11/02; H01L21/00; H01L21/22
Domestic Patent References:
| JP4318923A | ||||
| JP10321530A | ||||
| JP2001156008A | ||||
| JP61287225A | ||||
| JP3112672B2 | ||||
| JP4024488A | ||||
| JP3087379A | ||||
| JP4075329A | ||||
| JP3027039U |
Attorney, Agent or Firm:
Kimura Mitsuru