Title:
熱処理装置
Document Type and Number:
Japanese Patent JP4578615
Kind Code:
B2
Abstract:
When carrying workpieces from a loading area in which the workpieces are handled into a heat treatment furnace to make the workpieces subjected to a heat treatment process using a predetermined process gas, the loading area is evacuated and controlled at a predetermined low negative pressure. An exhaust for evacuating the loading area is connected to the loading area, and a controller controls the exhaust so that the loading area is maintained at the predetermined low negative pressure. A specific gas and particles contained in a gas discharged from the loading area are removed by filters.
Inventors:
Seiichi Yoshida
Ryuji Tanahashi
Akira Onodera
Motoi Akimoto
Ryuji Tanahashi
Akira Onodera
Motoi Akimoto
Application Number:
JP2000117288A
Publication Date:
November 10, 2010
Filing Date:
April 19, 2000
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
F27B1/20; H01L21/22; C23C16/44; C23C16/54; C30B31/18; F27B1/26; F27B1/28; F27D7/02; F27D17/00; F27D19/00; H01L21/00; H01L21/205; H01L21/324
Domestic Patent References:
| JP3064477A | ||||
| JP9082720A | ||||
| JP6318553A | ||||
| JP9055369A |
Attorney, Agent or Firm:
Nobuo Kinutani
Noriyuki Kanasaka
Noriyuki Kanasaka