Title:
加熱処理装置
Document Type and Number:
Japanese Patent JP4904296
Kind Code:
B2
Inventors:
Shinji Kobayashi
Application Number:
JP2008039574A
Publication Date:
March 28, 2012
Filing Date:
February 21, 2008
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/027
Domestic Patent References:
| JP2887382B2 | ||||
| JP2006108696A | ||||
| JP2005203712A | ||||
| JP2004193349A |
Foreign References:
| WO2004090951A1 |
Attorney, Agent or Firm:
Hiroshi Takayama