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Title:
熱処理装置
Document Type and Number:
Japanese Patent JP5730054
Kind Code:
B2
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Inventors:
Yoshii Ishii
Katsumi Tsuda
Naoki Takahashi
Application Number:
JP2011029233A
Publication Date:
June 03, 2015
Filing Date:
February 14, 2011
Export Citation:
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Assignee:
Advance Riko Co., Ltd.
International Classes:
F27B5/04; F27B5/16; F27D7/02; F27D7/04; H01L21/31
Domestic Patent References:
JP2012518917A
JP9088558A
JP2000182980A
JP10074702A
JP5190465A
JP7029827A
JP4186825A
JP63134600A
JP2010040541A
Foreign References:
WO2010099344A1
Attorney, Agent or Firm:
Masahiro Matsushita



 
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