Title:
熱処理装置
Document Type and Number:
Japanese Patent JP6720511
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a heat treatment device that can efficiently cool an infrared light emitting lamp and avoid generating a failure caused by a temperature of a luminous tube becoming too high.SOLUTION: A heat treatment device includes a light radiation unit comprising a rod-like infrared light emitting lamp composed of a luminous tube that is made from glass material and has both encapsulated ends and a filament arranged inside the luminous tube so as to be along the luminous tube's axial line. The light radiation unit further comprises an outer pipe forming a cooling air path extending in the lamp's lengthwise direction along the outer periphery surface of the infrared light emitting lamp. The outer pipe has a configuration in which cooling air inlets are formed at both ends in the lengthwise direction of the infrared light emitting lamp and a cooling air outlet is formed at a middle position in the lengthwise direction of the infrared light emitting lamp.SELECTED DRAWING: Figure 1
Inventors:
Kiyotaka Yoshikawa
Application Number:
JP2015231236A
Publication Date:
July 08, 2020
Filing Date:
November 27, 2015
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
H01K1/58; F27D11/02; H01J61/52; H01K1/08; H01K1/18; H01L21/26
Domestic Patent References:
| JP2013057414A | ||||
| JP3061043A | ||||
| JP2009026478A | ||||
| JP2009064622A | ||||
| JP2002110102A |
Attorney, Agent or Firm:
Nobuo Fujimoto
Shigenobu Oshiro
Masuo Yamada
Shigenobu Keisuke
Masahiko Oi
Shigenobu Oshiro
Masuo Yamada
Shigenobu Keisuke
Masahiko Oi