Title:
加熱処理装置
Document Type and Number:
Japanese Patent JP7366086
Kind Code:
B2
Abstract:
The present invention provides a heating treatment device, which can more minutely control the temperature of the surface of a workpiece to which an object for heat treatment is attached, the temperature of the rear surface of the workpiece, and the uneven temperature distribution in the plane of the workpiece, even if heating is performed from both sides of the workpiece, by a simplified method. The heat treatment device according to an aspect comprises: a chamber; a first heating unit which is provided inside the chamber, and has at least one first heater; a second heating unit which is provided inside the chamber, has at least one second heater, and faces the first heating unit; at least one first cracked plate which is provided between the first heating unit and the second heating unit; at least one second cracked plate which is provided between the first cracked plate and the second heating unit; a first treatment area which is provided between the first cracked plate and the second cracked plate, and on which the workpiece is supported; a first temperature control unit which is provided on the first cracked plate; and a second temperature control unit which is provided on the second cracked plate. The first temperature control unit comprises a first radiation unit which is provided with a gap intervening between the first radiation unit and the first cracked plate. The second temperature control unit comprises a second radiation unit which is provided with a gap intervening between the second radiation unit and the second cracked plate.
Inventors:
Akinori Iso
Takashi Takahashi
Takashi Takahashi
Application Number:
JP2021123920A
Publication Date:
October 20, 2023
Filing Date:
July 29, 2021
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
F26B9/06; H01L21/324; H05B3/00
Domestic Patent References:
| JP10112437A | ||||
| JP2002195755A |
Foreign References:
| WO2019117250A1 |
Attorney, Agent or Firm:
Masahiko Hyugaji
Junichi Kozaki
Hiroshi Ichikawa
Junichi Kozaki
Hiroshi Ichikawa