Title:
熱処理炉
Document Type and Number:
Japanese Patent JP3567129
Kind Code:
B2
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Inventors:
Makoto Ito
Yoshiharu Fukuyama
Yoshiharu Fukuyama
Application Number:
JP2000382571A
Publication Date:
September 22, 2004
Filing Date:
December 15, 2000
Export Citation:
Assignee:
Koyo Thermo System Co., Ltd.
International Classes:
F27D11/02; H01L21/22; H01L21/31; (IPC1-7): F27D11/02; H01L21/22; H01L21/31
Attorney, Agent or Firm:
Takafumi Watanabe