Title:
熱処理炉
Document Type and Number:
Japanese Patent JP5134595
Kind Code:
B2
Inventors:
Makoto Kobayashi
Ken Nakao
Ken Nakao
Application Number:
JP2009162781A
Publication Date:
January 30, 2013
Filing Date:
July 09, 2009
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/205; C23C16/46; F27B5/14; F27D11/02; H01L21/22; H05B3/06; H05B3/64; H05B3/66
Domestic Patent References:
| JP8064546A | ||||
| JP1136400U |
Attorney, Agent or Firm:
Nobuo Kinutani
Noriyuki Kanasaka
Noriyuki Kanasaka