Title:
HEAT TREATMENT FURNACE
Document Type and Number:
Japanese Patent JPH0743076
Kind Code:
A
Abstract:
PURPOSE: To prevent the adhesion of particles by changing the materials of insulating material and refractory block in a scavenger or the change of air stream in the same.
CONSTITUTION: The generating amount of dust in a scavenger is reduced by changing the material of a refractory block 3 and a heat insulating material 5 whereby the number of particles, adhered to a wafer, is reduced. On the other hand, air stream in the scavenger 2 is controlled by changing the position of a column type exhaust port 6 in the structure of the scavenger 2 whereby atmospher, containing the particles, does not hit the wafer and the adhesion of the particles to the wafer can be prevented.
Inventors:
YANO TAKESHI
Application Number:
JP18499393A
Publication Date:
February 10, 1995
Filing Date:
July 27, 1993
Export Citation:
Assignee:
MATSUSHITA ELECTRONICS CORP
International Classes:
F27B17/00; H01L21/22; H01L21/324; (IPC1-7): F27B17/00
Attorney, Agent or Firm:
Akira Kobiji (2 outside)
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