Title:
HEAT-TREATMENT METHOD AND APPARATUS
Document Type and Number:
Japanese Patent JP3910151
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a heat-treatment method and apparatus wherein its temperature lowering characteristic in a low-temperature region is so improved as to increase its throughput.
SOLUTION: The heat-treatment apparatus 1 subjects a plurality of processed objects w to a predetermined heat treatment, by storing them in a processing container 2 in the state of holding a multi-stage of them, wherein the processing container 2 is formed out of a metal, and a container cooling means 10 for making a refrigerant flow through the processing container 2 is provided, and a heating means 20 for heating the processed objects w is provided in the processing container 2, and further, there is provided a cooling-gas introducing means 27 having a plurality of blowing-away holes 26 for blowing away cooling gases dispersedly to the height regions corresponding to the multi-stage of processed objects w present in the processing container 2.
Inventors:
Takanori Saito
Kazuhide Serizawa
Takashi Ichikawa
Kazuhide Serizawa
Takashi Ichikawa
Application Number:
JP2003097672A
Publication Date:
April 25, 2007
Filing Date:
April 01, 2003
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/31; H01L21/768; H01L21/00; H01L21/22; H01L21/324; H01L23/522; (IPC1-7): H01L21/31; H01L21/324; H01L21/768; //H01L21/22
Domestic Patent References:
| JP3288426A | ||||
| JP2001176810A | ||||
| JP11260743A | ||||
| JP2002373890A | ||||
| JP2001196321A |
Attorney, Agent or Firm:
Nobuo Kinutani
Noriyuki Kanasaka
Noriyuki Kanasaka