熱処理方法 - ULVAC, Inc.

Title:

熱処理方法

Document Type and Number:

Japanese Patent JP4522569

Kind Code:

B2

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Inventors:

Seiichi Takahashi
Tetsuo Mitsuhashi
Takashi Komatsu
Kazuyuki Koizumi

Application Number:

JP2000334259A

Publication Date:

August 11, 2010

Filing Date:

November 01, 2000

Export Citation:

Assignee:

ULVAC, Inc.

International Classes:

F27B5/04; H01L21/3205; F27D7/06; H01L21/28; H01L23/52

Domestic Patent References:

Attorney, Agent or Firm:

Shigeo Ishijima
Hideki Abe

Previous Patent: JPS4522568

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