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Patent Searching and Data


Title:
HEAT TREATMETN FURNACE
Document Type and Number:
Japanese Patent JPH09159369
Kind Code:
A
Abstract:

To provide a heat treatment furnace, small in the occupying floor area thereof.

Hot air generating units 310 (320) are provided at the outside of a sending passage (returning passage) furnace cores 210 (220) while suction units 410 (420) are provided at the inside of the sending passage. A tray 100 is transported to the lower part of the sending passage furnace core 210 and substrates are put thereon, then, piled sequentially from the lower part of the sending passage furnace core 210 to move intermittently upward through the inside of the sending passage furnace core 210 and the substrates are shifted to the upper part of the returning passage furnace core 220 from the sending passage furnace core 210 in the upper part 230 of the core unit to move downward intermittently through the inside of the returning passage furnace core 220, then, the substrates are transported to the lower part of the returning passage furnace core 220 and are taken out to shift them from the lower part of the returning passage furnace core 220 to the lower part of the sending passage furnace core 210. The tray 100 is moved into up-and-down direction through the furnace core unit 200 like as an endless track whereby the substrates 20, put on the tray 100, are heat-treated sequentially and continuously.


Inventors:
Yoshida, Minoru
Suzuki, Masayuki
Misawa, Yoshihiko
Saeki, Keiji
Kabeshita, Akira
Application Number:
JP1995000344942
Publication Date:
June 20, 1997
Filing Date:
December 05, 1995
Export Citation:
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Assignee:
KOKUSAI DENKI ERUTETSUKU:KK
KOKUSAI ELECTRIC CO LTD
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
B23K1/008; F27B9/26; H01L21/22; H01L21/324; H05K3/34; (IPC1-7): F27B9/26; B23K1/008; H01L21/22; H01L21/324; H05K3/34
Attorney, Agent or Firm:
宮本 治彦