Title:
HEATER CONTROL DEVICE AND VACUUM GAUGE
Document Type and Number:
Japanese Patent JP2022134309
Kind Code:
A
Abstract:
To suppress increase of heater temperature to be unnecessarily high, with high accuracy.SOLUTION: A vacuum gauge 10 comprises a control circuit 22 performing feedback control on the temperature of a heater 12 based on the temperature of a pressure sensor 11. The control circuit 22 turns off a transistor 21C, and forcibly cuts off the electric conduction of the heater 12 when the temperature of the heater 12 detected by a first temperature sensor 14 becomes higher than a threshold value S1. Whereas, redundant first and second limit circuits 25 and 26 of the vacuum gauge 10 also monitor the temperature of the heater 12 detected by the first temperature sensor 14 individually, and turn off a transistor 21A or 21B when the temperature of the heater 12 detected by the first temperature sensor 14 becomes higher than a threshold value S2. Thereby, the electric conduction of the heater 12 is forcibly cut off.SELECTED DRAWING: Figure 1
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Inventors:
SATO KOYO
YANAGAWA TAKENARI
YOSHIKAWA YASUHIDE
OBARA KEISUKE
ICHIHARA JUN
YANAGAWA TAKENARI
YOSHIKAWA YASUHIDE
OBARA KEISUKE
ICHIHARA JUN
Application Number:
JP2021033361A
Publication Date:
September 15, 2022
Filing Date:
March 03, 2021
Export Citation:
Assignee:
AZBIL CORP
International Classes:
G01L21/00; H05B3/00
Attorney, Agent or Firm:
Shigeki Yamakawa
Masaki Yamakawa
Masaki Yamakawa