Title:
HEATER DEVICE, SUBSTRATE PROCESSING APPARATUS, AND MAINTENANCE METHOD
Document Type and Number:
Japanese Patent JP2015035481
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a heater device capable of suppressing generation of a process trouble during startup, maintenance, and repair.SOLUTION: The heater device is formed by mounting in an axial direction a plurality of separated cylindrical heater devices each having a cylindrical adiabatic wall body and a heater element, disposed inside the adiabatic wall body by being wound a plurality of times in a spiral form, and whose both ends penetrate from the inside of the adiabatic wall body to an outside and extend to an outside of the adiabatic wall body.
Inventors:
MATSUYOSHI HIROYUKI
Application Number:
JP2013165285A
Publication Date:
February 19, 2015
Filing Date:
August 08, 2013
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/324; C23C16/46; F27B5/14; F27D11/02; H01L21/22; H01L21/31; H05B3/66
Domestic Patent References:
| JP2011108596A | 2011-06-02 | |||
| JP2009076531A | 2009-04-09 | |||
| JP2008218478A | 2008-09-18 | |||
| JP2001210631A | 2001-08-03 | |||
| JP2013004904A | 2013-01-07 | |||
| JP2003257872A | 2003-09-12 | |||
| JPH08236461A | 1996-09-13 | |||
| JP2002352938A | 2002-12-06 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito
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