Title:
HEATER FOR HEATING SUBSTRATE AND METHOD FOR HEATING SUBSTRATE USING SAME
Document Type and Number:
Japanese Patent JPS6237924
Kind Code:
A
Abstract:
PURPOSE: To heat a substrate quickly, by providing a heat generating element with a material matching with the substrate so as to make said element emit radiation rays matched with the absorption spectrum of the substrate.
CONSTITUTION: A heat generating element 7 is composed of high-melting point materials such as tantalum, molybdenum, tungsten, etc., whose surface is covered with a coating layer 8 of the similar material to a substrate 1. The heater 6 constituted in above described manner is used, which emit radiation rays matched with the absorption spectrum of the substrate 1 on account of the existence of the coating layer 8. The substrate 1 is heated quickly, thereby.
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Inventors:
KATO YOSHINAO
ANDO YASUNORI
ANDO YASUNORI
Application Number:
JP17789585A
Publication Date:
February 18, 1987
Filing Date:
August 12, 1985
Export Citation:
Assignee:
NISSIN ELECTRIC CO LTD
International Classes:
H01L21/203; H01L21/26; (IPC1-7): H01L21/203; H01L21/26
Attorney, Agent or Firm:
Keiji Yamamoto