Title:
HEATER FOR SINGLE CRYSTAL PULLING-UP DEVICE
Document Type and Number:
Japanese Patent JP3618395
Kind Code:
B2
Abstract:
PURPOSE: To provide heater having a structure joining the heater body and a thermal section for power supply thereto, designed to prevent silicon, etc., from intruding into the joint by furnishing the heater body above the joint with a flow circulating part.
CONSTITUTION: The amount of silicon, etc., adhered to the heater body is increased due to repeated use of a single crystal pull device and sags are developed, and even in case such impurities are creepingly allowed to go down toward the terminal section of this heater, since a flow circulating part is furnished on the body above the joint, the flow circulating part serves as a penthouse, stopping the above-mentioned creeping of the impurities and thus preventing the impurities from intrusion into the joint. Even if the amount of silicon, it falls right under from the tip of the flow circulating part, thus avoiding the intrusion into the joint. The figure illustrates the sectional view of this heater for a single crystal pull device. The terminal section 11 is jointed via a bolt 12 to the body 13. Above the joint, the flow circulating part 14 e.g. in a finned fashion is furnished. Thus, even in a case that scattered silicon, etc., is creepingly allowed to go down along the body 13 and comes to the flow circulating part 14, it never comes to the joint 15.
Inventors:
Horio Yasuomi
Shun Takagi
Shun Takagi
Application Number:
JP9444195A
Publication Date:
February 09, 2005
Filing Date:
March 27, 1995
Export Citation:
Assignee:
IBIDEN CO.,LTD.
International Classes:
H05B3/14; C30B15/14; H05B3/62; (IPC1-7): C30B15/14; H05B3/14; H05B3/62
Domestic Patent References:
| JP3053791U | ||||
| JP2225393A | ||||
| JP5117078A |
Attorney, Agent or Firm:
Yasuo Yasutomi
Shinya Furuya
Shinya Furuya