Title:
HEATER FOR VACUUM EVAPORATION HAVING RESISTANCE AGAINST CORROSION
Document Type and Number:
Japanese Patent JPS5221278
Kind Code:
A
Abstract:
PURPOSE: Heater for vacuum evaporation, coating with corrosion resisting substance on high melting point metal such as W, Mo, Ta etc., having prolonged life.
Inventors:
NAKAJIMA MASAHIKO
WATANABE SHIYUUZOU
ISHII MASAJI
WATANABE SHIYUUZOU
ISHII MASAJI
Application Number:
JP9789975A
Publication Date:
February 17, 1977
Filing Date:
August 12, 1975
Export Citation:
Assignee:
DENKI KAGAKU KOGYO KK
International Classes:
C23C14/06; C23C14/24; C23C14/26; (IPC1-7): C23C13/04; C23C13/12
Domestic Patent References:
| JPS5074578A | 1975-06-19 |
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