Title:
HEATER
Document Type and Number:
Japanese Patent JP3174379
Kind Code:
B2
Abstract:
PURPOSE: To obtain a heater which has excellent spalling resistance, deterioration resistance and reactivity resistance and in which a temperature can be stably raised and lowered for a long period.
CONSTITUTION: An inorganic coating layer 3 is used as a support of a heat generator 2 in a laminate in which the coating layer coated on its inner surface with inorganic fiber cloth and having a bulk density of 1.0-2.0g/cm3 is formed on an inner surface of an inorganic molded form having a bulk density of 0.3-0.8g/cm3. A heater has a treating vessel 1 in which a material to be treated is disposed on an inner soaking area, the laminate so disposed as to surround the vessel 1, and the generator 2 supported to the coating layer of the laminate 3, and comprises cooling means for cooling the soaking area of the vessel 1.
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Inventors:
Ken Nakao
Seiji Sakurai
Yoshihisa Miyahara
Yoshiyuki Motoyoshi
Seiji Sakurai
Yoshihisa Miyahara
Yoshiyuki Motoyoshi
Application Number:
JP4634992A
Publication Date:
June 11, 2001
Filing Date:
February 03, 1992
Export Citation:
Assignee:
東京エレクトロン株式会社
ニチアス株式会社
ニチアス株式会社
International Classes:
F27D11/02; C30B25/10; C30B31/12; F27B5/04; F27D1/00; H01L21/22; H05B3/14; H05B3/64; (IPC1-7): F27D11/02; F27D1/00; H01L21/22; H05B3/64
Attorney, Agent or Firm:
Masahiko Ohi
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