Title:
HEATING APPARATUS
Document Type and Number:
Japanese Patent JP3845647
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a heating apparatus that can fast raise and lower the temperature of a hotplate compared to a conventional heating apparatus.
SOLUTION: Post exposure baking equipment 44 has a hotplate 70 in it composed of aluminum nitride that is excellent in thermal conductivity and strength, and this hotplate 70 is heated up by a heater 71 that is printed in its bottom side. A support 65 composed of PTFE that is excellent in thermal insulation properties adheres closely to the hotplate 70, thus supporting the whole circumference of the hotplate 70. Further, a nozzle 74 is provided in a heat exchanging chamber T formed down the hotplate 70, and the apparatus is structured such that when the temperature of the hotplate 70 is lowered, a coolant gas is blown against the rear side of the hotplate 70.
Inventors:
Mitsuhiro Tagami
Tetsuya Oda
Tetsuya Oda
Application Number:
JP2004223067A
Publication Date:
November 15, 2006
Filing Date:
July 30, 2004
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
F26B3/20; H01L21/027; B01J19/00; F26B9/06; F26B23/06; F27D7/06; F27D9/00; G03F7/30; H05B3/10; H05B3/16; H05B3/20; H05B3/68; (IPC1-7): H01L21/027; F26B3/20; F26B9/06; F26B23/06
Domestic Patent References:
| JP2196416A | ||||
| JP3131016A | ||||
| JP10284382A | ||||
| JP4300249A |
Attorney, Agent or Firm:
Tetsuo Kanamoto
Miaki Kametani
Koji Hagiwara
Miaki Kametani
Koji Hagiwara