PURPOSE: To eliminate the limitation of the sample measuring position by providing a cooling mechanism on a sample drive base at the lower side of a sample cassette, and furthermore, making a cooling tank movable up and down separately from the sample.
CONSTITUTION: When a sample 1 in a high temperature condition is cooled, the input power of a heater 4 is cut off, a liquid nitrogen cooling tank 5 is moved in the direction of Z-axis 11 by a liquid nitrogen tank Z-direction drive mechanism 22, and the contact surface 24 of the liquid nitrogen tank is contacted to a sample cassette contact surface 23 at a high temperature condition. In this case, the heat of a sample cassette 2 is led to the tank 5 through both contact surfaces, so as to cool the cassette 2. A liquid nitrogen is fed to the tank 5 from the external side through a flexible tube 6. As a result, the tank 5 can be moved in the same mode to the movement of the cassette 2, and the sample 1 can be heated and cooled at a desired position the sample is positioned. Furthermore, by providing a conveying chamber at the side of the sample chamber through a gate valve in such a constitution, the cassette can be replaced without exposing the sample chamber in the atmosphere.
IGARASHI TOKUSHICHI
MATSUYAMA HIDEO
