Title:
HEATING DEVICE AND HEATING METHOD
Document Type and Number:
Japanese Patent JP2019027623
Kind Code:
A
Abstract:
To provide a heating device and a heating method where, while suppressing the enlargement of the device, the flow of a high temperature gaseous matter is formed on the surface of a substrate to remove an unneeded gas from the vicinity of the surface of the substrate.SOLUTION: There is provided a heating device comprising: a plurality of bar-shaped heater 20; and a plurality outer tubes 30 covering the bar-shaped heaters 20. A gaseous matter fed from a gaseous matter feed part is heated with the bar-shaped heaters 20 at the inside of the outer tubes 30. Then, the gaseous matter after the heating is discharged from a discharge port 32 of the outer tube 30 toward a substrate 9. In this way, the flow of the high temperature gaseous matter is formed on the surface of the substrate 9, and an unneeded gas is removed from the vicinity of the surface of the substrate 9. Further, the heating of the substrate 9 and the heating of the gaseous matter are performed with the common bar-shaped heaters 20. In this way, the enlargement of the device is suppressed.SELECTED DRAWING: Figure 4
Inventors:
HANEDA KOJI
Application Number:
JP2017144751A
Publication Date:
February 21, 2019
Filing Date:
July 26, 2017
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD
International Classes:
F27B17/00; F27D7/02; F27D11/02
Domestic Patent References:
| JP2007227773A | 2007-09-06 | |||
| JP2011230010A | 2011-11-17 |
Foreign References:
| WO2016199926A1 | 2016-12-15 | |||
| KR20160030727A | 2016-03-21 |
Attorney, Agent or Firm:
Takami Nishida