Title:
HEATING DEVICE FOR MICROSCOPE
Document Type and Number:
Japanese Patent JP3522656
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a heating device for a microscope by which the temperature of a transparent plate for heating on which an inspection sample is placed or a transparent plate for protection are always kept at a specified temperature, whose temperature distribution is uniform, and which can be made thinner.
SOLUTION: As to this heating device 40 for the microscope 40; the transparent plate for heating constituted of a base plate 41 and a transparent conductive film 42 has an exposed part 47 which is not overlapping the transparent plate 43 for protection, and a temperature sensor 49 is provided on the part 47. Therefore, the sensor 49 can accurately detect the temperature of the film 42. That is, the sensor 49 is provided with the exposure part which is not filled with an insulating transparent material, so that the temperature of the film can be accurately detected.
Inventors:
Tsuchiya, Hideji
Application Number:
JP2000177272A
Publication Date:
April 26, 2004
Filing Date:
July 08, 1999
Export Citation:
Assignee:
TOKAI HIT:KK
International Classes:
G02B21/30; (IPC1-7): G02B21/30
Attorney, Agent or Firm:
吉川 晃司 （外１名）
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