To provide a heating device capable of preventing hang-down of a flange due to thermal deformation.
The device includes a cylindrical shell 50, a heater hung down at an inner periphery of, and supported by, the shell 50, for heating a substrate, a support metal fitting supporting the heater to the shell 50, and an insulator attaching the heater to the support fitting. The support fitting is fixed to an inner periphery side of the shell 50 through a fixing unit 34x so as to make a flange 34f protruded. The flange 34f includes slits 34a, 34w between each two support fittings and each two insulator mounting units 34b, so that thermal expansion is absorbed. Further, the fixing unit 34x is fitted to each insulator mounting unit 34b, thereby thermal deformation due to overheating can be restrained.
MURATA HITOSHI
KOSUGI TETSUYA
UENO MASAAKI
SHIMADA SHINICHI
KITAMURA KIMIO
TANAKA KENJI
HASAN MASUDUL
NISHIHARA JUNICHI
TSUKADA JUN
TEITOKUSHA KK
| JP2009033117A | 2009-02-12 | |||
| JP2006222450A | 2006-08-24 |
Toshio Takao