Title:
Heating device
Document Type and Number:
Japanese Patent JP5998461
Kind Code:
B2
Inventors:
Yukio Ueshima
Application Number:
JP2011254745A
Publication Date:
September 28, 2016
Filing Date:
November 22, 2011
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
H01L21/26; H01K7/00
Domestic Patent References:
| JP2005108967A | ||||
| JP2011065759A | ||||
| JP2009081239A | ||||
| JP2012140684A | ||||
| JP2003059855A | ||||
| JP2011505707A | ||||
| JP7130677A | ||||
| JP2002082624A |
Attorney, Agent or Firm:
Masahiko Oi
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