Title:
加熱装置
Document Type and Number:
Japanese Patent JP6438352
Kind Code:
B2
Inventors:
Takamichi Ogawa
Application Number:
JP2015107103A
Publication Date:
December 12, 2018
Filing Date:
May 27, 2015
Export Citation:
Assignee:
Nippon Special Ceramics Co., Ltd.
International Classes:
H05B3/74; H01L21/683; H05B3/06
Domestic Patent References:
| JP2013012413A | ||||
| JP2009182139A |
Attorney, Agent or Firm:
Hisahiko Atsumi