To eliminate trace of a pin caused on the surface of a substrate due to uneven heating by disposing a hot plate above an object to be heated thereby preventing a generated sublimate from adhering, as a foreign matter, to the surface of the substrate.
A reflector 2 and a glass substrate 4 are held by pins 3 and a high temperature hot plate(HP) 1 is set above the glass substrate 4 while opening the side face 5 of a heating furnace. The HP 1 is made of a metal, e.g. aluminum, iron or copper, preferably subjected to surface treatment of ceramic, for example, and an electric heater is employed as a heating source. Since a high temperature hot plate(HP) 1 is set above an object to be heated, a generated sublimate is not deposited on the object and a foreign matter is not generated. Consequently, undue temperature rise of pin can be prevented while ensuring uniform in-plane heating of the substrate and stabilized transportation.
GOTO TETSUYA
SUZUKI TETSUO
TANAKA SATOSHI
