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Patent Searching and Data


Title:
HEATING MEANS, PLACING BASE, AND HEAT TREATMENT EQUIPMENT
Document Type and Number:
Japanese Patent JP2005019479
Kind Code:
A
Abstract:

To provide an inexpensive heating means that can suppress the occurrence of contaminations caused by organic matters, metals, etc., and, in addition, can be manufactured relatively easily.

The heating means is formed by welding a quartz tube 62, through which a carbon wire 64 which generates heat when the wire 64 is conducted is passed to the surface of a reflecting plate 60 composed of opaque quartz. Consequently, the heating means can be provided inexpensively, because a heated object to be treated can be heated by little causing contaminations caused by organic matters, metals, etc., and, in addition, the means can be manufactured relatively easily.


Inventors:
Arami, Jiyunichi
Application Number:
JP2003000178690
Publication Date:
January 20, 2005
Filing Date:
June 23, 2003
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
H05B3/84; C23C16/46; F27B5/04; F27B5/14; F27B17/00; H01L21/00; H01L21/02; H01L21/22; H01L21/31; H01L21/324; H05B3/14; (IPC1-7): H01L21/324; C23C16/46; H01L21/02; H01L21/22; H01L21/31; H05B3/84