Title:
HEATING OVEN
Document Type and Number:
Japanese Patent JPS54121667
Kind Code:
A
Abstract:
PURPOSE:To increase the life time of the quartz oven core tube by providing the reinforcing substance which supports the bottom part of the oven core tube and prevents the malformation caused by heat. CONSTITUTION:The heating oven consists of cylindrical oven body 1 made of the lagging material, side wall 2 of a disk form attached across oven body 1 and coil- shaped heater 3. And tray 8 formed into a gutter shape with silicon carbide or the like is inserted detachably into the oven, and quartz oven core 4 provided removably is supported by tray 8. At the same time, pierced hole 7 is provided at the side area of oven body 1 to store thermocouple 5 inserted from outside, and the tip of 5 is made to come near core tube 4. Tray 8 functions to prevent tube 4 from hanging down due to the malformation caused by a high temperature as well as to locate the tip of thermocouple 5 close to tube 4.
Inventors:
WATANABE SHINJI
SUGIMOTO KINYA
SUGIMOTO KINYA
Application Number:
JP2867478A
Publication Date:
September 20, 1979
Filing Date:
March 15, 1978
Export Citation:
Assignee:
HITACHI LTD
International Classes:
F27B5/00; H01L21/22; (IPC1-7): F27B5/00; H01L21/22