Title:
HELIUM LEAK TESTER
Document Type and Number:
Japanese Patent JP2000241289
Kind Code:
A
Abstract:
To provide a helium leak tester which can perform test in a short time even when the member of a specimen itself discharges a gas significantly.
A specimen W composed of a resin part Wa and a non-resin part Wb and previously encapsulating helium gas as a probe gas is held while vacuum sealing the side face of the resin part Wa having high gas discharge rate with upper and lower O-rings 10. Since the resin part Wa of the specimen W separated by two O-rings 10 is not exposed to vacuum in a chamber 2, gas is not discharged from that part.
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Inventors:
OKAMOTO HIDEKI
Application Number:
JP4632799A
Publication Date:
September 08, 2000
Filing Date:
February 24, 1999
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
G01L21/12; G01M3/20; G01M3/32; (IPC1-7): G01M3/20; G01L21/12; G01M3/32
Attorney, Agent or Firm:
Yoshiaki Nishioka
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