Title:
ヘリウム精製方法およびヘリウム精製装置
Document Type and Number:
Japanese Patent JP5372607
Kind Code:
B2
Inventors:
Masanori Miyake
Mayumi Fukushima
Toshihiko Sumita
Mayumi Fukushima
Toshihiko Sumita
Application Number:
JP2009129771A
Publication Date:
December 18, 2013
Filing Date:
May 29, 2009
Export Citation:
Assignee:
Sumitomo Seika Co., Ltd.
International Classes:
C01B23/00; B01D53/04
Domestic Patent References:
| JP2003192315A | ||||
| JP2002137909A |
Attorney, Agent or Firm:
Minoru Yoshida
Tatsuya Tanaka
Tatsuya Tanaka