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Title:
HERMETICALLY SEALED CONTAINER
Document Type and Number:
Japanese Patent JPH04196220
Kind Code:
A
Abstract:

PURPOSE: To take out a chemical liquid without coming into contact with a gas or a liquid at the outside by a method wherein a hermetically sealed container is formed to be of double structure, an inside container is formed of a soft material so as to be capable of being expanded and contracted, a pressure is exerted between an outside container and the inside container and the chemical liquid is taken out from the inside container.

CONSTITUTION: An inside container 2 which can be expanded and contracted is installed newly at the inside of a hermetically sealed container 1; a gas or a liquid for pressurization use can flow into the gap between the outside container 1 and the inside container 2. In a state that a chemical liquid 6 has been filled into the inside container 2, a fluid such as a gas, a liquid or the like is injected at a prescribed pressure from an inflow port 4. Then, the fluid flows into a part between the hermetically sealed liquid-housing container 1 and the inside container 2, and a pressure is exerted on the outside of the inside container 2. When the pressure is exerted, the inside container 2 is compressed, its volume is reduced and the chemical liquid 6 can be taken out from an inside- liquid takeout port 3. Thereby, the chemical liquid can be fed out while the chemical liquid does not come into direct contact with a gas.


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Inventors:
TSUTSUI TOSHIKAZU
Application Number:
JP32687390A
Publication Date:
July 16, 1992
Filing Date:
November 27, 1990
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
B65D83/34; B65D83/36; H01L21/304; (IPC1-7): B65D83/34; B65D83/36; H01L21/304
Attorney, Agent or Firm:
Masuo Oiwa (2 outside)



 
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