Title:
第３種の気体の排気用高コンダクタンス・クライオポンプ
Document Type and Number:
Japanese Patent JP5764096
Kind Code:
B2
Abstract:
A cryopump provides for high pumping speed of Type III gases. An open configuration of a frontal array provides high conductance of gases into a radiation shield which is shaped to focus gases toward a second stage array. The second stage array has an open configuration of baffles coated with adsorbent. Substantially all of the adsorbent has a direct line of sight to the radiation shield or to the opening in the radiation shield, and substantially all of the baffles are coated with adsorbent. In one form, the second stage cryopump array comprises an array of discs fanned to define a generally ball shaped envelope.
Inventors:
Bartlett Allen Jay
Nordborg John
Thompson Bryan
Nordborg John
Thompson Bryan
Application Number:
JP2012144083A
Publication Date:
August 12, 2015
Filing Date:
June 27, 2012
Export Citation:
Assignee:
Brooks Automation Incorporated
International Classes:
F04B37/16; F04B37/08
Domestic Patent References:
| JP11182956A | ||||
| JP1092591A | ||||
| JP63501585A | ||||
| JP2000240569A | ||||
| JP45480A |
Foreign References:
| US4555907 | ||||
| US5450729 |
Attorney, Agent or Firm:
Shuji Sugimoto
Masashi Noda
Kenro Tsutsumi
Masashi Noda
Kenro Tsutsumi