Title:
高精細パターンの形成方法及び装置
Document Type and Number:
Japanese Patent JP5153332
Kind Code:
B2
Inventors:
Shinji Kanda
Application Number:
JP2007523416A
Publication Date:
February 27, 2013
Filing Date:
June 22, 2006
Export Citation:
Assignee:
Elphotech Co., Ltd.
International Classes:
G03F7/30; B05B7/04; C23F1/08; G03F7/40
Domestic Patent References:
JPH11352699A | 1999-12-24 | |||
JPH0913192A | 1997-01-14 | |||
JPH05160546A | 1993-06-25 | |||
JP2002016031A | 2002-01-18 | |||
JP2004281787A | 2004-10-07 | |||
JP2004053923A | 2004-02-19 | |||
JP2004237282A | 2004-08-26 | |||
JP2005079569A | 2005-03-24 | |||
JP2003145064A | 2003-05-20 | |||
JP2000328266A | 2000-11-28 | |||
JP2000047391A | 2000-02-18 | |||
JPS6310157A | 1988-01-16 | |||
JPS62151583A | 1987-07-06 | |||
JP2001155990A | 2001-06-08 | |||
JPH0213959A | 1990-01-18 | |||
JP2002139848A | 2002-05-17 | |||
JPH11352699A | 1999-12-24 | |||
JPH0913192A | 1997-01-14 | |||
JPH05160546A | 1993-06-25 | |||
JP2002016031A | 2002-01-18 | |||
JP2004281787A | 2004-10-07 | |||
JP2004053923A | 2004-02-19 | |||
JP2004237282A | 2004-08-26 | |||
JP2005079569A | 2005-03-24 | |||
JP2003145064A | 2003-05-20 | |||
JP2000328266A | 2000-11-28 | |||
JP2000047391A | 2000-02-18 |
Foreign References:
WO2002033490A1 | 2002-04-25 | |||
WO2002033490A1 | 2002-04-25 |
Attorney, Agent or Firm:
Morio Nakamura