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Title:
高精細パターンの形成方法及び装置
Document Type and Number:
Japanese Patent JP5153332
Kind Code:
B2
Inventors:
Shinji Kanda
Application Number:
JP2007523416A
Publication Date:
February 27, 2013
Filing Date:
June 22, 2006
Export Citation:
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Assignee:
Elphotech Co., Ltd.
International Classes:
G03F7/30; B05B7/04; C23F1/08; G03F7/40
Domestic Patent References:
JPH11352699A1999-12-24
JPH0913192A1997-01-14
JPH05160546A1993-06-25
JP2002016031A2002-01-18
JP2004281787A2004-10-07
JP2004053923A2004-02-19
JP2004237282A2004-08-26
JP2005079569A2005-03-24
JP2003145064A2003-05-20
JP2000328266A2000-11-28
JP2000047391A2000-02-18
JPS6310157A1988-01-16
JPS62151583A1987-07-06
JP2001155990A2001-06-08
JPH0213959A1990-01-18
JP2002139848A2002-05-17
JPH11352699A1999-12-24
JPH0913192A1997-01-14
JPH05160546A1993-06-25
JP2002016031A2002-01-18
JP2004281787A2004-10-07
JP2004053923A2004-02-19
JP2004237282A2004-08-26
JP2005079569A2005-03-24
JP2003145064A2003-05-20
JP2000328266A2000-11-28
JP2000047391A2000-02-18
Foreign References:
WO2002033490A12002-04-25
WO2002033490A12002-04-25
Attorney, Agent or Firm:
Morio Nakamura



 
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