Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
HIGH-EFFICIENCY MACHINING METHOD BY HIGH-DENSITY FREE RADICAL REACTION USING ROTARY ELECTRODE AND DEVICE THEREFOR
Document Type and Number:
Japanese Patent JP3069271
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To improve mechanisms for supplying and discharging a reactive gas to and from the gap between a machining electrode and a work and to greatly improving a machining speed by rotating the machining electrode at a high speed in a plasma CVM method.
SOLUTION: The machining gap is formed between the endless part 9 of the machining electrode 1 disposed in a chamber where the reactive gas and an atmosphere gas contg. an inert gas are hermetically sealed or circulated and the machining progressing part 10 of the work 2. High-frequency electric power is supplied to the machining electrode 1 and the machining electrode 1 is rotated at a high sped. As a result, plasma is generated in the machining gap and a volatile material is evaporated by the free radical reaction of the formed neutral free radicals and the atoms or molecules constituting the work 2 and is removed from the machining progressing part 10. On the other hand, the gaseous flow to cross the gap by including the gas therein is formed on the surface 11 of the machining electrode by the high-speed rotation of the machining electrode 1, by which a large amt. of the reactive gas and inert gas for forming the neutral free radicals are supplied between the endless part 9 and the machining progressing part 10.


Inventors:
Yuzo Mori
Application Number:
JP17647695A
Publication Date:
July 24, 2000
Filing Date:
July 12, 1995
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
Yuzo Mori
International Classes:
B23K10/00; B23H1/00; B23H7/12; B26F3/00; C23F4/00; H01L21/301; H01L21/302; H01L21/304; H01L21/3065; H05H1/24; (IPC1-7): C23F4/00; B26F3/00; H01L21/301; H01L21/302; H01L21/304
Domestic Patent References:
JP6177246A
JP349827A
JP6344227A
JP679143U
Attorney, Agent or Firm:
Takao Yagino